Output data file format
The following is the format of the excel file produced by each simulation run. The simulation run appends each run for the same specimen into an excel workbook, alowing the data between the runs to be easily compared.The data at the end of the file is calculated by the simulation program from the 3D energy deposition matrix, and is the depth dose in this case (which is plotted by excel).
In this data, various parameters relevant to the simulation are printed, along with some of the simulation results. For example, under the simulation conditions of stop electron energy of 5050 eV it can be seen that only about 47% of the electron energy has been deposited.
SI_TIME.R05 CONTENTS
Dose smoothing factor 2
Sim run at 12/10/99 16:06
Sim time [sec] [sec] 12
Exp name SI_TIME
Exp filename C:\0\SIMULA~1\MC-SET\DATA\SI_TIME
Exp last update 12/10/99 16:04
Exp Comment Time resolved energy deposition
Spec filename C:\0\SIMULA~1\MC-SET\DATA\SI.SPC
Spec name SILICON
Spec last update 12/10/99 16:01
Spec comment silicon specimen for time resolve
Electrons [nmbr] 5000
Calculation mode Plural scattering JOY95 HK
Beam voltage [kV] 10
Beam tilt [deg] 0
Beam position x,y,z [um] 0.00 0.00 0.00
Beam diameter [A] 0
Plotting depth [um] 1.5
Electron stop [eV] 5050
BS electrons data output YES
Energy matrix file YES
SE data output NO
Transmitted electrons NO
Material Si Silicon
Atomic number, mass 14 28.09
Density [gr/cm3] 2.32
Coords (x,y,z) [um] -10.00 -10.00 0.00
Coords (x,y,z) [um] 10.00 10.00 10.00
BS electrons [nmbr] 705
[ratio] 0.14
BS energy [eV] 5226016.96
[%] 10.45
Exit electrons [nmbr] 705
[%] 14.1
Exit energy [eV] 5226016.96
[%] 10.45
Energy not in plot [eV] 66450.1
[%] 0.13
Energy in matrix [eV] 23672754.66
[%] 47.35
Total trajectory ste [nmbr] 164332
Energy in layers Layer nmbr Energy [eV] [%] of t [%] of s
0 23492527 46.99 100
axis labels Depth dose [eV/um]
Depth [um]
title MC-SET Depth dose
Data start
0 36974099
0.015 34364444
0.03 32341955
0.045 30193977
0.06 31439554
0.075 32582154
0.09 33529643
0.105 33992866
0.12 34125021
0.135 34285488
0.15 34720310
0.165 35638977
0.18 36261266
0.195 36530332
0.21 36450666
0.225 36673510
0.24 36996910
0.255 37054799
0.27 36966132
0.285 36992355
0.3 37175377
0.315 36801332
0.33 36122799
0.345 35344866
0.36 35246621
0.375 34796999
0.39 34361021
0.405 33633866
0.42 32885266
0.435 32093510
0.45 31111599
0.465 30286154
0.48 29445754
0.495 28810532
0.51 27704332
0.525 26487532
0.54 25302577
0.555 24789910
0.57 24149555
0.585 23319621
0.6 22197977
0.615 20819444
0.63 19549288
0.645 18237755
0.66 17263888
0.675 16250555
0.69 15342910
0.705 14553732
0.72 13701688
0.735 12645688
0.75 11469910
0.765 10204310
0.78 9144066
0.795 8096532
0.81 7339910
0.825 6638777
0.84 5888177
0.855 5012355
0.87 4029999
0.885 3132777
0.9 2324621
0.915 1698088
0.93 1188954
0.945 781643
0.96 475243
0.975 248043
0.99 104065
1.005 23399
1.02 8532
1.035 2133
1.05 0
1.065 0
1.08 0
1.095 0
1.11 0
1.125 0
1.14 0
1.155 0
1.17 0
1.185 0
1.2 0
1.215 0
1.23 0
1.245 0
1.26 0
1.275 0
1.29 0
1.305 0
1.32 0
1.335 0
1.35 0
1.365 0
1.38 0
1.395 0
1.41 0
1.425 0
1.44 0
1.455 0
1.47 0
1.485 0
Data end
